The Säntis 300 system has been designed for fully automated control of 150, 200 and 300 mm wafers.
Attolight’s Quantitative CL-SEMs offer “No Compromise” large field fast scanning simultaneous acquisition of SEM image, hyperspectral CL maps, and optical spectra. Smaller diameter wafers, or miscellaneously shaped substrates are manually loaded on intermediary 300 mm susceptors subsequently handled automatically by the tool.
The Säntis 300 system offers 3 distinct acquisition modes : step and repeat (S & R), continuous scanning mode (AWpix), integrative scanning mode (FWbrush)：– Up to 300 mm wafer tool
1、Microstructured LEDs (MicroLed)——Step and Repeat and AWPix modes
2、LED——Full wafer brush mode
3、GaN on Sapphire wafer——Threading dislocation density
4、SiC substrate——Defect inspection & classification
5、GaN HEMT——Step & Repeat mode, cross-section